Investigation of strain relaxion mechanism in Si-SiO2 system during the process of its formation

statement of authorship
D.Kropman, V.Poll, T.Kärner, Ü.Ugaste, E.Mellikov, U.Arbu, V.Paomets
journal volume number month
198
year of publication
pages
2, p. 297-301
ISSN
0031-8965
language
inglise