Formation of large area Al contacts on 6H- and 4H-SiC substrates
author
Korolkov, Oleg
Rang, Toomas
statement of authorship
O.Korolkov and T.Rang
source
Silicon Carbide and Related Materials : ECSCRM2000 : proceedings of the 3rd European Conference on Silicon Carbide and Related Materials : Kloster Banz, Germany, September 2000
location of publication
[S. l.]
publisher
Trans Tech Publications
year of publication
2001
pages
p. 603-606 : ill
subject term
ränikarbiid
ISBN
0-87849-873-7
notes
Bibliogr.: 4 ref
language
inglise