Design and optimization of AlN based RF MEMS switches
author
statement of authorship
Mehadi Hasan Ziko and Ants Koel
journal volume number month
vol. 362, 1
year of publication
pages
012002 ; 9 p.: ill
conference name, date
International Conference on Smart Engineering Materials : ICSEM 2018 : March 7-9, 2018
conference location
Bucharest, Romania
subject term
subject of form
ISSN
1757-8981
notes
Bibliogr.: 11 ref
Open Access
Open Access
scientific publication
teaduspublikatsioon
classifier
WOS
category (general)
kvartiil
TTÜ department
language
inglise
Ziko, M.H., Koel, A. Design and optimization of AlN based RF MEMS switches // IOP conference series : materials science and engineering (2018) vol. 362, 1, 012002 ; 9 p.: ill.