Process development for 3D laser lithography
author
Kaste, N.
Filbert, A.
Mescheder, U.
Rang, Toomas
Rang, Galina
statement of authorship
N. Kaste, A. Filbert, U. Mescheder, T. Rang & G. Rang
source
High performance and optimum design of structures and materials
location of publication
Southampton
publisher
WIT Press
year of publication
2014
pages
p. 139-150 : ill
series
WIT transactions on the built environment ; 137
conference name, date
7th International Conference on High Performance and Optimum Design of Structures and Materials (HPSM)
conference location
Ostend, Belgium
url
https://doi.org/10.2495/HPSM140131
subject term
fotolitograafia
lasertehnoloogia
Scopus
https://www.scopus.com/sourceid/5700191221
https://www.scopus.com/record/display.uri?eid=2-s2.0-84903147280&origin=inward&txGid=e1ae4752b9b2ada50986679520d8e0cc
quartile
Q3
category (general)
Engineering
Tehnika
Arts and humanities
Kunst ja humanitaarteadused
Social sciences
Sotsiaalteadused
category (sub)
Engineering. Architecture
Tehnika. Arhitektuur
Arts and humanities. Arts and humanities (miscellaneous)
Kunst ja humanitaarteadused. Kunst ja humanitaarteadused (mitmesugused)
Social sciences. Safety research
Sotsiaalteadused. Ohutusuuringud
Engineering. Safety, risk, reliability and quality
Tehnika. Ohutus, risk, töökindlus ja kvaliteet
Engineering. Building and construction
Tehnika. Ehitus ja ehitus
Engineering. Automotive engineering
Tehnika. Autotehnika
keyword
MEMS
greyscale
direct laser writing
3D photolithography
tactile sensor
medical application
ISSN
1746-4498
ISBN
978-1-84564-774-2
notes
Bibliogr.: 6 ref
TalTech department
Thomas Johann Seebecki elektroonikainstituut
language
inglise