Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology
author
Podgurski, Vitali
Bogatov, Andrei
Sedov, V.
Sildos, Ilmo
Mere, Arvo
Viljus, Mart
Buijnsters, J. G.
Ralchenko, V.
statement of authorship
V. Podgursky, A. Bogatov, V. Sedov, I. Sildos, A. Mere, M. Viljus, J.G. Buijnsters, V. Ralchenko
source
Diamond and related materials
publisher
Elsevier
journal volume number month
Vol. 58
year of publication
2015
pages
p. 172-179 : ill
url
https://doi.org/10.1016/j.diamond.2015.07.002
subject term
nanokristallid
õhukesed kiled
teemantkatted
vastupidavus
keyword
nanocrystalline diamond films
scaling
growth dynamics
roughness
atomic force microscopy
ISSN
0925-9635
notes
Bibliogr.: 26 ref
scientific publication
teaduspublikatsioon
classifier
1.1
Scopus
https://www.scopus.com/sourceid/24680
https://www.scopus.com/record/display.uri?eid=2-s2.0-84938910882&origin=inward&txGid=7d59d8033dcd7b34f051ba8eb487c31c
WOS
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=DIAM%20RELAT%20MATER&year=2015
https://www.webofscience.com/wos/woscc/full-record/WOS:000362137100025
category (general)
Physics and astronomy
Füüsika ja astronoomia
Engineering
Tehnika
Materials science
Materjaliteadus
Chemistry
Keemia
category (sub)
Physics and astronomy. General physics and astronomy
Füüsika ja astronoomia. Üldfüüsika ja astronoomia
Engineering. Mechanical engineering
Tehnika. Masinaehitus
Engineering. Electrical and electronic engineering
Tehnika. Elektri- ja elektroonikatehnika
Materials science. Electronic, optical and magnetic materials
Materjaliteadus. Elektroonilised, optilised ja magnetilised materjalid
Chemistry. General chemistry
Keemia. Üldine keemia
Materials science. Materials chemistry
Materjaliteadus. Materjalide keemia
quartile
Q1
TalTech department
materjalitehnika instituut
materjaliteaduse instituut
füüsikainstituut
materjaliuuringute teaduskeskus
language
inglise