Interaction between point defects, extended defects and impurities in the Si-SiO2 system during the process of its formation
author
Kropman, Daniel
Kärner, T.
Abru, Uno
Ugaste, Ülo
Mellikov, Enn
Kauk, Marit
statement of authorship
D.Kropman, T.Kärner, U.Abru, Ü.Ugaste, E.Mellikov, M.Kauk
source
Materials science and engineering : B
journal volume number month
114-115
year of publication
2004
pages
p. 295-298 : ill
url
https://www.sciencedirect.com/science/article/abs/pii/S0921510704003459
subject term
metallograafia
transmissioon
elektronmikroskoopia
integraallülitused
defektid
töökindlus
ISSN
0921-5107
notes
Bibliogr.: 10 ref
language
inglise