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Silicon planar technology process modeling

author
Rang, Toomas
Tarnay, K.
Masszi, F.
statement of authorship
T. Rang, K. Tarnay, F. Masszi, J. Mizsei, P. Baji, G. Drozdy, B. Kovacs
source
Test methods in electronics technology : third International Spring Seminar on Electronics Technology, May 15-18, 1979, Balatonfüred, Hungary
location of publication
Budapest
publisher
[s.n]
year of publication
1979
pages
p. 110-120
conference name, date
Third International Spring Seminar on Electronics Technology, May 15-18, 1979,
conference location
Balatonfüred, Hungary
subject term
pooljuhtide tehnoloogia
TalTech department
elektroonika kateeder
language
inglise
Rang, T., Tarnay, K., Masszi, F. et al. Silicon planar technology process modeling // Test methods in electronics technology : third International Spring Seminar on Electronics Technology, May 15-18, 1979, Balatonfüred, Hungary. Budapest : [s.n], 1979. p. 110-120.