A choise of flexible, ultraclean processing strategy for advanced minifabs of competitive ULSI
author
Bubennikov, Alexander N.
Bubennikov, Alexander A.
statement of authorship
A.N.Bubennikov, A.A.Bubennikov
source
BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings
location of publication
[Tallinn]
year of publication
1996
pages
p. 125-128: ill
ISBN
9985-59-026-0
notes
Bibl. 3 ref