Comparative ellipsometric and ion beam analytical studies on ion beam crystallized silicon implanted with Zn and Pb ions
author
Lohner, Tivador
Angelov, Christo
Mikli, Valdek
statement of authorship
Tivador Lohner, Christo Angelov and Valdek Mikli
source
Thin solid films
journal volume number month
516
year of publication
2008
pages
22, p. 8009-8012
url
https://www.sciencedirect.com/science/article/pii/S0040609008003660
subject term
ioonimplantatsioon
räni
ioonkiired
kristallisatsioon
ellipsomeetria
spektromeetria
optilised omadused
ISSN
0040-6090
language
inglise