TCAD with device-circuit simulators for advanced process development, correlations between model parameters and optimization
author
statement of authorship
Alexander N.Bubennikov
location of publication
Tallinn
publisher
year of publication
pages
p. 517-522: ill
conference name, date
BEC : Baltic Electronics Conference, October 9-14, 1994
conference location
Tallinn (Estonia
subject term
ISBN
9985-59-012-0
notes
Bibl. 6 ref
language
inglise
Bubennikov, A.N. TCAD with device-circuit simulators for advanced process development, correlations between model parameters and optimization // BEC : Baltic Electronics Conference : proceedings of the 4th Biennial Conference, October 9-14, 1994, Tallinn (Estonia). 2. Tallinn : Tallinn University of Technology, 1994. p. 517-522: ill.