Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining
author
Kruusing, Arvi
Leppävuori, Seppo
Uusimäki, Antti
Uusimäki, M.
statement of authorship
Arvi Krusing, Sepo Lepävuori, Antti Uusimäki, Mati Uusimäki
source
Design, Test and Microfabrication of MEMS and MOEMS : 30 March-1 April, 1999, Paris, France
location of publication
[S.l.]
publisher
SPIE
year of publication
1999
pages
p. 870-878 : ill
series
Proceedings of SPIE ; 3680, 2
url
https://opticalengineering.spiedigitallibrary.org/conference-proceedings-of-spie/3680/0000/Rapid-prototyping-of-silicon-structures-by-aid-of-laser-and/10.1117/12.341285.full
subject term
räni
mikrostruktuur
prototüüpimine
vedelikud
aparaadid
lasertöötlus
lasertehnoloogia
keyword
laser machining
abrasive-jet machining
silcon microstructures
ISSN
0277-786X
notes
Bibliogr.: 35 ref
language
inglise