Enhanced grain orientation in Sb2Se3 thin films deposited on Mo/BSG substrates via RF-sputtering and selenization

statement of authorship
Mehmet Ender Uslu, Katri Muska, Maris Pilvet, Sergei Bereznev, Valdek Mikli, Marit Kauk-Kuusik, Maarja Grossberg-Kuusk
publisher
journal volume number month
vol. 184
year of publication
pages
art. 108835
ISSN
1873-4081
scientific publication
teaduspublikatsioon
classifier
1.1
language
inglise
Uslu, M. E., Muska, K., Pilvet, M., Bereznev, S., Mikli, V., Kauk-Kuusik, M., Grossberg-Kuusk, M. Enhanced grain orientation in Sb2Se3 thin films deposited on Mo/BSG substrates via RF-sputtering and selenization // Materials science in semiconductor processing (2024) vol. 184, art. 108835. https://doi.org/10.1016/j.mssp.2024.108835