From virtual characterization to test-chips : DFM analysis through pattern enumeration
author
Martins, Mayler G.A.
Pagliarini, Samuel Nascimento
Isgenc, Mehmet Meric
Pileggi, Larry
statement of authorship
Mayler G.A. Martins, Samuel N. Pagliarini, Mehmet Meric Isgenc, Larry Pileggi
source
IEEE transactions on computer-aided design of integrated circuits and systems
publisher
IEEE
journal volume number month
vol. 39, no. 2
year of publication
2020
pages
p. 520-532
url
https://doi.org//10.1109/TCAD.2018.2889772
subject term
integraallülitused
standardid (normid)
räni
litograafia
keyword
Libraries
Microsoft Windows
Silicon
Layout
Lithography
Shape
Standards
Design for manufacturability
DFM analysis
pattern enumeration
test-chips
virtual characterization
ISSN
0278-0070
scientific publication
teaduspublikatsioon
classifier
1.1
TalTech department
arvutisüsteemide instituut
language
inglise
Reserch Group
Centre for hardware security