Diffusion welding technology for 6H-SiC substrates
author
Korolkov, Oleg
Rang, Toomas
statement of authorship
O.Korolkov, T.Rang
source
BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings
location of publication
[Tallinn]
year of publication
1998
pages
p. 251-252: ill
subject term
pooljuhtseadised
ränikarbiid
difusioon (füüsika)
keevitus
ISBN
9985-59-081-3
notes
Bibl. 4 ref
language
inglise