Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD"
author
statement of authorship
Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, A. Outi, I. Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam A. Łapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov and Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Çağla Özgit-Akgün, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H.A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin, Tobias Törndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M.E. Ylivaara, Oksana Yurkevich
source
Journal of vacuum science & technology A : vacuum, surfaces, and films
journal volume number month
vol. 35, 1
year of publication
pages
p. 010801-1 - 010801-13
subject term
subject of form
ISSN
0734-2101
notes
Bibliogr.: 61 ref
TTÜ department
language
inglise
Ahvenniemi, E., Akbashev, A.R., Ali, S., Rauwel, E. et al. Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD" // Journal of vacuum science & technology A : vacuum, surfaces, and films (2017) vol. 35, 1, p. 010801-1 - 010801-13.