Aristov, V.V., Dubonos, S.V., Gaifullin, B.N., Svintsov, A.A., Zaitsev, S.I., Raith, H.F.

Micro- and nano-E-beam lithography using PROXY

author

Aristov, V.V.

Dubonos, S.V.

Gaifullin, B.N.

Svintsov, A.A.

Zaitsev, S.I.

Raith, H.F.

statement of authorship

V.V.Aristov, S.V.Dubonos, B.N.Gaifullin, A.A.Svintsov, S.I.Zaitsev, H.F.Raith

source

BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings

location of publication

[Tallinn]

year of publication

1996

pages

p. 121-124: ill

subject term

elektronlitograafia

programmipaketid

tarkvara

ISBN

9985-59-026-0

notes

Bibl. 13 ref

language

inglise

Aristov, V.V., Dubonos, S.V., Gaifullin, B.N., Svintsov, A.A., Zaitsev, S.I., Raith, H.F. Micro- and nano-E-beam lithography using PROXY // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 121-124: ill.