ULSI-ahelad (subject term)

types of item

  • book article
    A choise of flexible, ultraclean processing strategy for advanced minifabs of competitive ULSIBubennikov, Alexander N.; Bubennikov, Alexander A.BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings1996 / p. 125-128: ill
    book article
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