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book article
Micro- and nano-E-beam lithography using PROXY
Aristov, V.V.
;
Dubonos, S.V.
;
Gaifullin, B.N.
;
Svintsov, A.A.
;
Zaitsev, S.I.
;
Raith, H.F.
BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings
1996
/
p. 121-124: ill
book article
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