Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer depositionJõgiaas, Taivo; Zabels, Roberts; Tamm, Aile; Merisalu, Maido; Hussainova, IrinaSurface and coatings technology2015 / p. 36-42 : ill https://doi.org/10.1016/j.surfcoat.2015.10.008 Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS