Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substratesAlamgir, Asad; Bogatov, Andrei; Yashin, Maxim; Podgurski, VitaliProceedings of the Estonian Academy of Sciences2019 / p. 126-130 : ill https://doi.org/10.3176/proc.2019.2.01 http://www.kirj.ee/public/proceedings_pdf/2019/issue_2/proc-2019-2-126-130.pdf Journal metrics at Scopus Article at Scopus Journal metrics at WOS Article at WOS