Process development for 3D laser lithography
Kaste, N.
;
Filbert, A.
;
Mescheder, U.
;
Rang, Toomas
;
Rang, Galina
High performance and optimum design of structures and materials
2014
/
p. 139-150 : ill
https://doi.org/10.2495/HPSM140131
https://www.scopus.com/sourceid/5700191221
https://www.scopus.com/record/display.uri?eid=2-s2.0-84903147280&origin=inward&txGid=e1ae4752b9b2ada50986679520d8e0cc