Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology
Podgurski, Vitali
;
Bogatov, Andrei
;
Sedov, V.
;
Sildos, Ilmo
;
Mere, Arvo
;
Viljus, Mart
;
Buijnsters, J. G.
;
Ralchenko, V.
Diamond and related materials
2015
/
p. 172-179 : ill
https://doi.org/10.1016/j.diamond.2015.07.002
https://www.scopus.com/sourceid/24680
https://www.scopus.com/record/display.uri?eid=2-s2.0-84938910882&origin=inward&txGid=7d59d8033dcd7b34f051ba8eb487c31c
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=DIAM%20RELAT%20MATER&year=2015
https://www.webofscience.com/wos/woscc/full-record/WOS:000362137100025