Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition
Jõgiaas, Taivo
;
Zabels, Roberts
;
Tamm, Aile
;
Merisalu, Maido
;
Hussainova, Irina
Surface and coatings technology
2015
/
p. 36-42 : ill
https://doi.org/10.1016/j.surfcoat.2015.10.008
https://www.scopus.com/sourceid/24537
https://www.scopus.com/record/display.uri?eid=2-s2.0-84946114167&origin=inward&txGid=6b1c7ef0f6d16fb4faac9efc27d8c312
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=SURF%20COAT%20TECH&year=2015
https://www.webofscience.com/wos/woscc/full-record/WOS:000365370200005