Influence of post-UV/ozone treatment of ultrasonic-sprayed zirconium oxide dielectric films for a low-temperature oxide thin film transistor
Oluwabi, Abayomi Titilope
;
Gaspar, Diana
;
Katerski, Atanas
;
Mere, Arvo
;
Krunks, Malle
;
Pereira, Luis
;
Oja Acik, Ilona
Materials
2020
/
art. 6, 14 p. : ill
https://doi.org/10.3390/ma13010006
https://www.scopus.com/sourceid/76627
https://www.scopus.com/record/display.uri?eid=2-s2.0-85096220063&origin=inward&txGid=775097391a063d4348ee022ee38f38ab
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=MATERIALS&year=2022
https://www.webofscience.com/wos/woscc/full-record/WOS:000515499300006