Growth surface morphology, and electrical resistivity of fully strained substoichiometric epitaxial TiN
x
(0.67 ≤ x < 1.0) layers on MgO(001)
Shin, C.-S.
;
Rudenja, Sergei
;
Gall, D.
;
Hellgren, N.
;
Lee, T.-Y.
;
Petrov, I.
;
Greene, J.E.
Journal of applied physics
2004
/
1, p. 356-362 : ill
https://www.researchgate.net/publication/228927816_Growth_surface_morphology_and_electrical_resistivity_of_fully_strained_substoichiometric_epitaxial_TiN_067_x_10_layers_on_MgO_001