Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates
Alamgir, Asad
;
Bogatov, Andrei
;
Yashin, Maxim
;
Podgurski, Vitali
Proceedings of the Estonian Academy of Sciences
2019
/
p. 126-130 : ill
https://doi.org/10.3176/proc.2019.2.01
http://www.kirj.ee/public/proceedings_pdf/2019/issue_2/proc-2019-2-126-130.pdf
https://www.scopus.com/sourceid/11500153303
https://www.scopus.com/record/display.uri?eid=2-s2.0-85067627412&origin=inward&txGid=0bb8821b27addd5fa2ff92ca1f3661f9
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=P%20EST%20ACAD%20SCI&year=2022
https://www.webofscience.com/wos/woscc/full-record/WOS:000467872000002