Design and optimization of AlN based RF MEMS switches
Ziko, Mehadi Hasan
;
Koel, Ants
IOP conference series : materials science and engineering
2018
/
012002 ; 9 p.: ill
https://doi.org/10.1088/1757-899X/362/1/012002
https://www.scopus.com/sourceid/19700200831
https://www.scopus.com/record/display.uri?eid=2-s2.0-85050668333&origin=inward&txGid=86b6dc783475bdf8eeb104d4168c3041
https://www.webofscience.com/wos/woscc/full-record/WOS:000447159700002