Understanding and control of stress at Si-SiO2 interface
Kropman, Daniel
;
Seeman, Viktor
;
Medvids, Arturs
;
Onufrijevs, Pavels
;
Vitusevich, Svetlana
;
Mikli, Valdek
Key engineering materials
2020
/
p. 291−296
https://doi.org/10.4028/www.scientific.net/KEM.850.291
https://www.scopus.com/sourceid/12378
https://www.scopus.com/record/display.uri?eid=2-s2.0-85088298651&origin=inward&txGid=57d66fc6d526d749bfec9d1fdbf4390a