Atomic layer deposition of high-k dielectrics on carbon nanoparticles
Tamm, Aile
;
Koel, Mihkel
;
Peikolainen, Anna-Liisa
Thin solid films
2013
/
p. 16-20 : ill
https://doi.org/10.1016/j.tsf.2012.09.071
https://www.scopus.com/sourceid/12347
https://www.scopus.com/record/display.uri?eid=2-s2.0-84879079949&origin=resultslist&sort=plf-f&src=s&sot=b&sdt=b&s=DOI%2810.1016%2Fj.tsf.2012.09.071%29
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=THIN%20SOLID%20FILMS&year=2013
https://www.webofscience.com/wos/woscc/full-record/WOS:000320584800004