Comparative characteristics of diffusion welded Al contacts to 6H- and 4H-SiC substrates
autor
Korolkov, Oleg
Rang, Toomas
vastutusandmed
O.Korolkov, T.Rang
allikas
The 7th Biennial Conference on Electronics and Microsystem Technology "Baltic Electronics Conference" : BEC 2000 : October 8 - 11, 2000, Tallinn, Estonia : conference proceedings
ilmumiskoht
[Tallinn]
kirjastus/väljaandja
Tallinn Technical University
ilmumisaasta
2000
leheküljed
p. 23-26 : ill
ISBN
9985-59-179-8
märkused
Bibiogr.: 5 ref