Diffusion welding technology for 6H-SiC substrates
autor
Korolkov, Oleg
Rang, Toomas
vastutusandmed
O.Korolkov, T.Rang
allikas
BEC'98 : the 6th Biennial Conference on Electronics and Microsystems Technology, October 7-9, 1998, Tallinn, Estonia : proceedings
ilmumiskoht
[Tallinn]
ilmumisaasta
1998
leheküljed
p. 251-252: ill
ISBN
9985-59-081-3
märkused
Bibl. 4 ref