Kaste, N., Filbert, A., Mescheder, U., Rang, T, Rang, G.

prindi

Process development for 3D laser lithography

autor

Kaste, N.

Filbert, A.

Mescheder, U.

Rang, Toomas

Rang, Galina

vastutusandmed

N. Kaste, A. Filbert, U. Mescheder, T. Rang & G. Rang

allikas

High performance and optimum design of structures and materials

ilmumiskoht

Southampton

kirjastus/väljaandja

WIT Press

ilmumisaasta

2014

leheküljed

p. 139-150 : ill

seeria-sari

WIT transactions on the built environment ; 137

konverentsi nimetus, aeg

7th International Conference on High Performance and Optimum Design of Structures and Materials (HPSM)

konverentsi toimumispaik

Ostend, Belgium

märksõna

fotolitograafia

lasertehnoloogia

võtmesõna

MEMS

greyscale

direct laser writing

3D photolithography

tactile sensor

medical application

ISSN

1746-4498

ISBN

978-1-84564-774-2

märkused

Bibliogr.: 6 ref

TTÜ struktuuriüksus

Thomas Johann Seebecki elektroonikainstituut

keel

inglise

Kaste, N., Filbert, A., Mescheder, U., Rang, T, Rang, G. Process development for 3D laser lithography // High performance and optimum design of structures and materials. Southampton : WIT Press, 2014. p. 139-150 : ill. (WIT transactions on the built environment ; 137).