Growth surface morphology, and electrical resistivity of fully strained substoichiometric epitaxial TiNx (0.67 ≤ x < 1.0) layers on MgO(001)
autor
vastutusandmed
C.-S.Shin, S.Rudenja, D.Gall, N.Hellgren, T.-Y.Lee, I.Petrov, and J.E.Greene
allikas
ajakirja aastakäik number kuu
Volume 95
ilmumisaasta
leheküljed
1, p. 356-362 : ill
ISSN
0021-8979
märkused
Bibliogr.: 32 ref
Shin, C.-S., Rudenja, S., Gall, D., Hellgren, N., Lee, T.-Y., Petrov, I., Greene, J.E. Growth surface morphology, and electrical resistivity of fully strained substoichiometric epitaxial TiNx (0.67 ≤ x < 1.0) layers on MgO(001) // Journal of applied physics (2004) Volume 95, 1, p. 356-362 : ill.