Aristov, V.V., Dubonos, S.V., Gaifullin, B.N., Svintsov, A.A., Zaitsev, S.I., Raith, H.F.

prindi

Micro- and nano-E-beam lithography using PROXY

autor

Aristov, V.V.

Dubonos, S.V.

Gaifullin, B.N.

Svintsov, A.A.

Zaitsev, S.I.

Raith, H.F.

vastutusandmed

V.V.Aristov, S.V.Dubonos, B.N.Gaifullin, A.A.Svintsov, S.I.Zaitsev, H.F.Raith

allikas

BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings

ilmumiskoht

[Tallinn]

ilmumisaasta

1996

leheküljed

p. 121-124: ill

ISBN

9985-59-026-0

märkused

Bibl. 13 ref

Aristov, V.V., Dubonos, S.V., Gaifullin, B.N., Svintsov, A.A., Zaitsev, S.I., Raith, H.F. Micro- and nano-E-beam lithography using PROXY // BEC'96 : the 5th Biennial Baltic Electronics Conference, October 7-11, 1996, Tallinn, Estonia : proceedings. [Tallinn], 1996. p. 121-124: ill.