Comparative results of low temperature annealing of lightly doped n-layers of silicon carbide irradiated by protons and electrons
Kozlovski, Vitali V.
;
Korolkov, Oleg
;
Lebedev, Alexander A.
;
Toompuu, Jana
;
Sleptsuk, Natalja
Silicon Carbide and Related Materials 2019 : 18th International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM 2019), Kyoto, Japan, September 29 - October 4, 2019
2020
/
p. 231-236
https://doi.org/10.4028/www.scientific.net/MSF.1004.231
https://www.scopus.com/sourceid/28700
https://www.scopus.com/record/display.uri?eid=2-s2.0-85089817325&origin=resultslist&sort=plf-f&src=s&sid=a6fb1194242752ab2b252272d233250c&sot=b&sdt=b&s=TITLE-ABS-KEY%28%22comparative+results+of+low+temperature%22%29&sl=23&sessionSearchId=a6fb1194242752ab2b252272d233250c&relpos=0