Review article : recommended reading list of early publications on atomic layer deposition-outcome of the "Virtual Project on the History of ALD"
Ahvenniemi, Esko
;
Akbashev, Andrew R.
;
Ali, Saima
;
Rauwel, Erwan
Journal of vacuum science & technology A : vacuum, surfaces, and films
2017
/
p. 010801-1 - 010801-13
https://doi.org/10.1116/1.4971389
https://www.scopus.com/sourceid/28596
https://www.scopus.com/record/display.uri?eid=2-s2.0-85007005785&origin=inward&txGid=f478929e3c5f67bed4dce39822dd2e2d
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=J%20VAC%20SCI%20TECHNOL%20A&year=2017
https://www.webofscience.com/wos/woscc/full-record/WOS:000392120900050