Dedicated to the memory of Prof. M. Sheinkman effect of ultrasonic treatment on the defect structure of the Si-SiO2 system
Kropman, Daniel
;
Dolgov, Sergei
;
Onufrijevs, Pavels
;
Dauksta, Edvins
Gettering and Defect Engineering in Semiconductor Technology XV
2014
/
p. 352-357 : ill
https://doi.org/10.4028/www.scientific.net/SSP.205-206.352
https://www.scopus.com/sourceid/21100305259
https://www.scopus.com/record/display.uri?eid=2-s2.0-84886782662&origin=inward&txGid=689574b4b5c8f661d063627c2f2df3e1
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=SOLID%20STATE%20PHENOM&year=2005
https://www.webofscience.com/wos/woscc/full-record/WOS:000336338000051