Solid phase and ion beam epitaxial crystallization of Si implanted with Zn and Pb ions

vastutusandmed
Ch.Angelov, S.Georgiev, B.Amov, V.Mikli, T.Lohner
ajakirja aastakäik number kuu
9
ilmumisaasta
leheküljed
2, p. 311-314
märksõna
ioonimplantatsioon
ISSN
1454-4164
keel
inglise
Angelov, Ch., Georgiev, S., Amov, B., Mikli, V., Lohner, T. Solid phase and ion beam epitaxial crystallization of Si implanted with Zn and Pb ions // Journal of optoelectronics and advanced materials (2007) 9, 2, p. 311-314. https://www.researchgate.net/publication/289467840_Solid_phase_and_ion_beam_epitaxial_crystallization_of_Si_implanted_with_Zn_and_Pb_ions