The specificity of solid-phase interaction of aluminium with silicon carbide in the manufacture of diffusion-welded contacts to semiconductor devices

vastutusandmed
N. Sleptsuk, O. Korolkov, J. Toompuu, T. Rang, V. Mikli
ajakirja aastakäik number kuu
Vol. 18, No. 8
ilmumisaasta
leheküljed
p. 45-48 : ill
võtmesõna
contacts to semiconductors
solid-phase-interaction
ISSN
1392-1215
2029-5731 (online)
märkused
Bibliogr.: 4 ref
keel
inglise
Sleptsuk, N., Korolkov, O., Toompuu, J., Rang, T., Mikli, V. The specificity of solid-phase interaction of aluminium with silicon carbide in the manufacture of diffusion-welded contacts to semiconductor devices // Elektronika ir elektrotechnika = Electronics and electrical engineering (2012) Vol. 18, No. 8, p. 45-48 : ill. https://eejournal.ktu.lt/index.php/elt/article/view/2610