prindi

Modelling of metal alloy contacts to semiconductor substrate

autor
Rang, Toomas
vastutusandmed
T.Rang
allikas
Simulation and design of microsystems and microstructures
ilmumiskoht
Southampton
kirjastus/väljaandja
Computational Mechanics Publications
ilmumisaasta
1995
leheküljed
p. 251-258: ill
ISBN
1-85312-390-0
märkused
Bibl. 10 ref
Rang, T. Modelling of metal alloy contacts to semiconductor substrate // Simulation and design of microsystems and microstructures. Southampton : Computational Mechanics Publications, 1995. p. 251-258: ill.