prindi

Metallization technologies for wide band-gap semiconductor substrates : (invited paper)

autor
Rang, Toomas
Korolkov, Oleg
Pikkov, Mihhail
vastutusandmed
Toomas Rang, Oleg Korolkov, Mihhail Pikkov
allikas
Proceedings of the 6th Nexuspan Workshop Microsystems Technology Activities in Baltic Region : 23-24 April, 1999, Vilnius, Lithuania
ilmumiskoht
Kaunas
kirjastus/väljaandja
Technologija
ilmumisaasta
1999
leheküljed
p. 27-30
märksõna
pooljuhtseadised
tehnoloogia
metallitamine
keel
inglise
Rang, T., Korolkov, O., Pikkov, M. Metallization technologies for wide band-gap semiconductor substrates : (invited paper) // Proceedings of the 6th Nexuspan Workshop Microsystems Technology Activities in Baltic Region : 23-24 April, 1999, Vilnius, Lithuania. Kaunas : Technologija, 1999. p. 27-30.