Influence of post-UV/ozone treatment of ultrasonic-sprayed zirconium oxide dielectric films for a low-temperature oxide thin film transistor
author
Oluwabi, Abayomi Titilope
Gaspar, Diana
Katerski, Atanas
Mere, Arvo
Krunks, Malle
Pereira, Luis
Oja Acik, Ilona
statement of authorship
Abayomi Titilope Oluwabi, Diana Gaspar, Atanas Katerski, Arvo Mere, Malle Krunks, Luis Pereira and Ilona Oja Acik
source
Materials
publisher
MDPI
journal volume number month
vol. 13, 1
year of publication
2020
pages
art. 6, 14 p. : ill
url
https://doi.org/10.3390/ma13010006
subject term
õhukesed kiled
pihustamine
madalad temperatuurid
keyword
spray pyrolysis
low-temperature
zirconium oxide
Indium-Gallium-Zinc-Oxide
UV-ozone
high-κ dielectrics
thin film transistor
ISSN
1996-1944
notes
Bibliogr.: 47 ref
Open Access
Open Access
scientific publication
teaduspublikatsioon
classifier
1.1
Scopus
https://www.scopus.com/sourceid/76627
https://www.scopus.com/record/display.uri?eid=2-s2.0-85096220063&origin=inward&txGid=775097391a063d4348ee022ee38f38ab
WOS
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=MATERIALS&year=2022
https://www.webofscience.com/wos/woscc/full-record/WOS:000515499300006
category (general)
Physics and astronomy
Füüsika ja astronoomia
Materials science
Materjaliteadus
category (sub)
Physics and astronomy. Condensed matter physics
Füüsika ja astronoomia. Kondenseeritud aine füüsika
Materials science. General materials science
Materjaliteadus. Üldine materjaliteadus
quartile
Q1
TalTech department
materjali- ja keskkonnatehnoloogia instituut
language
inglise
Reserch Group
Laboratory of thin film energy materials
,
Laboratory of chemical thin film technologies (until February 28, 2023)