Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates
author
Alamgir, Asad
Bogatov, Andrei
Yashin, Maxim
Podgurski, Vitali
statement of authorship
Asad Alamgir, Andrei Bogatov, Maxim Yashin, and Vitali Podgursky
source
Proceedings of the Estonian Academy of Sciences
publisher
Estonian Academy Publishers
journal volume number month
vol. 68, 2
year of publication
2019
pages
p. 126-130 : ill
conference name, date
Modern Materials and Manufacturing 2019 (MMM 2019), April 24-26, 2019
conference location
Tallinn
url
https://doi.org/10.3176/proc.2019.2.01
http://www.kirj.ee/public/proceedings_pdf/2019/issue_2/proc-2019-2-126-130.pdf
subject term
alumiiniumoksiid
õhukesed kiled
nanostruktuursed materjalid
mehaanilised omadused
deformatsioon
keyword
nanoindentation
alumina oxide thin films
atomic layer deposition
nano-scratch
deformations
ISSN
1736-6046
notes
Kokkuvõte: Si(100) substraatidele aatomkihtsadestamisel valmistatud 100 nm paksusega Al2O3kilede mehaanilised ja triboloogilised omadused
Bibliogr.: 13 ref
Open Access
Open Access
scientific publication
teaduspublikatsioon
classifier
1.1
Scopus
Journal metrics at Scopus
Article at Scopus
WOS
Journal metrics at WOS
Article at WOS
category (general)
Engineering
en
Tehnika
et
category (sub)
Engineering. General engineering
en
Tehnika. Üldine inseneriteadus
et
kvartiil
Q2
TTÜ department
mehaanika ja tööstustehnika instituut
language
inglise