Formation of large area Al contacts on 6H- and 4H-SiC substrates
author
statement of authorship
O.Korolkov and T.Rang
location of publication
[S. l.]
publisher
year of publication
pages
p. 603-606 : ill
ISBN
0-87849-873-7
notes
Bibliogr.: 4 ref
language
inglise
subject term
Korolkov, O., Rang, T. Formation of large area Al contacts on 6H- and 4H-SiC substrates // Silicon Carbide and Related Materials : ECSCRM2000 : proceedings of the 3rd European Conference on Silicon Carbide and Related Materials : Kloster Banz, Germany, September 2000. [S. l.] : Trans Tech Publications, 2001. p. 603-606 : ill.