Low-K factor of SiO2 layer on Si irradiated by YAG:Nd laser
author
Medvid, A.
Onufrijevs, Pavels
Mellikov, Enn
Kropman, Daniel
Muktepavela, F.
Bakradze, G.
statement of authorship
A.Medvid, P.Onufrijevs, E.Mellikov, D.Kropman, F.Muktepavela, G.Bakradze
source
Journal of non-crystalline solids
journal volume number month
353
year of publication
2007
pages
p. 703-707 : ill
url
https://www.sciencedirect.com/science/article/pii/S0022309306014116
subject term
laserid
defektid
ränidioksiid
interaktsioonid
ISSN
0022-3093
notes
Bibliogr.: 13 ref
language
inglise