Electrochemical evaluation of TiN coatings
author
Rudenja, Sergei
Kulu, Priit
Talimets, Ellen
Mikli, Valdek
Straede, C.A.
Zwieg, T.
statement of authorship
S. Rudenja, P. Kulu, E. Talimets, V. Mikli, C.A. Straede and T. Zwieg
source
Proceedings of the Symposium on Interconnect and Contact Metallization
location of publication
Pennington
publisher
The Electrochemical Society
year of publication
1998
pages
p. 108-119 : ill
series
The Electrochemical Society proceedings ; Vol. 97, 31
subject term
elektrokeemia
kattematerjalid
ISSN
0161-6374
ISBN
1-56677-184-6
notes
Bibliogr.: 30 ref
language
inglise