Process development for 3D laser lithography
author
statement of authorship
N. Kaste, A. Filbert, U. Mescheder, T. Rang & G. Rang
source
High performance and optimum design of structures and materials
location of publication
Southampton
publisher
year of publication
pages
p. 139-150 : ill
series
WIT transactions on the built environment ; 137
conference name, date
7th International Conference on High Performance and Optimum Design of Structures and Materials (HPSM)
conference location
Ostend, Belgium
subject term
keyword
MEMS
greyscale
direct laser writing
3D photolithography
tactile sensor
medical application
ISSN
1746-4498
ISBN
978-1-84564-774-2
notes
Bibliogr.: 6 ref
TTÜ department
language
inglise
Kaste, N., Filbert, A., Mescheder, U., Rang, T, Rang, G. Process development for 3D laser lithography // High performance and optimum design of structures and materials. Southampton : WIT Press, 2014. p. 139-150 : ill. (WIT transactions on the built environment ; 137).