Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition
author
Jõgiaas, Taivo
Zabels, Roberts
Tamm, Aile
Merisalu, Maido
Hussainova, Irina
statement of authorship
Taivo Jõgiaas, Roberts Zabels, Aile Tamm, Maido Merisalu, Irina Hussainova, ... [et al.]
source
Surface and coatings technology
publisher
Elsevier
journal volume number month
Vol. 282
year of publication
2015
pages
p. 36-42 : ill
url
https://doi.org/10.1016/j.surfcoat.2015.10.008
subject term
nanomaterjalid
mehaanilised omadused
aatomkihtsadestamine
õhukesed kiled
keyword
instrumented nano-indentation
metal oxide nano-laminates
mechanical properties
thin film
atomic layer deposition
ISSN
0257-8972
notes
Bibliogr.: 30 ref
scientific publication
teaduspublikatsioon
classifier
1.1
Scopus
https://www.scopus.com/sourceid/24537
https://www.scopus.com/record/display.uri?eid=2-s2.0-84946114167&origin=inward&txGid=6b1c7ef0f6d16fb4faac9efc27d8c312
WOS
https://jcr.clarivate.com/jcr-jp/journal-profile?journal=SURF%20COAT%20TECH&year=2015
https://www.webofscience.com/wos/woscc/full-record/WOS:000365370200005
category (general)
Physics and astronomy
Füüsika ja astronoomia
Materials science
Materjaliteadus
Chemistry
Keemia
category (sub)
Physics and astronomy. Condensed matter physics
Füüsika ja astronoomia. Kondenseeritud aine füüsika
Materials science. Materials chemistry
Materjaliteadus. Materjalide keemia
Materials science. Surfaces, coatings and films
Materjaliteadus. Pinnad, katted ja kiled
Chemistry. General chemistry
Keemia. Üldine keemia
Physics and Astronomy. Surfaces and interfaces
Füüsika ja astronoomia. Pinnad ja liidesed
quartile
Q1
TalTech department
materjalitehnika instituut
language
inglise