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Corrosion failure of columnar TiN layer by enhanced anodic oxidation

author
Rudenja, Sergei
Kulu, Priit
Mikli, Valdek
statement of authorship
S. Rudenja, P. Kulu, V. Mikli
source
Abstracts of MRS Meeting : San-Fransisco, USA, 2001
location of publication
[S.l.]
year of publication
2001
pages
p. 331
language
inglise
Rudenja, S., Kulu, P., Mikli, V. Corrosion failure of columnar TiN layer by enhanced anodic oxidation // Abstracts of MRS Meeting : San-Fransisco, USA, 2001. [S.l.], 2001. p. 331.