Comparative characteristics of diffusion welded Al contacts to 6H- and 4H-SiC substrates
author
statement of authorship
O.Korolkov, T.Rang
location of publication
[Tallinn]
publisher
year of publication
pages
p. 23-26 : ill
ISBN
9985-59-179-8
notes
Bibiogr.: 5 ref
language
inglise
subject term
Korolkov, O., Rang, T. Comparative characteristics of diffusion welded Al contacts to 6H- and 4H-SiC substrates // The 7th Biennial Conference on Electronics and Microsystem Technology "Baltic Electronics Conference" : BEC 2000 : October 8 - 11, 2000, Tallinn, Estonia : conference proceedings. [Tallinn] : Tallinn Technical University, 2000. p. 23-26 : ill.